Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. The Author of this Book is Wei Gao It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. Array ISBN . The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing) available in English. The second half presents a number of scanning-type measuring systems for surface forms and stage motions.